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E-beam Pattern Conversion and Proximity Correction

Equipment Training
Layout BEAMER training is part of the General Electron Beam Lithography Training. See CNF Lab Users Electron-Beam Lithography page for details on trainings.

Description:

The preparation of large layout data for e-beam direct write requires a highly efficient, flexible and robust framework for design and execution of complex processes including layout handling, processing, PEC, process modeling & correction, inspection and conversion to the machine format. Layout BEAMER is a highly intuitive, process flow driven layout processing solution.

Capabilities:

  • VisualFLOWTM graphical user interface for drag & drop design of process flows
  • Import of layouts in different formats
  • Layout Viewer
  • Extraction of cells, layers or regions of interest
  • Export to different formats

  • Layout operation (e.g. healing, tone-reversal, bias, Boolean functions)

  • E-Beam Proximity Effect Correction
  • Output formatter for different E-Beam machines

Large Beamer Flows:

If you are processing a large BEAMER design, you may need more resources than those available on the physical CNF conversion computers. We have you covered – BEAMER can be run in the cloud on AWS for low hourly rates. CNF Computing will work with you to set up a virtual machine optimized for your jobs memory, cpu, and/or disk I/O and storage requirements.

Documentation:

Invoking Beamer:

On the CNF conversion computers, the current version of GenISys Beamer can be invoked with any of the following commands (don't type in the dollar sign, that is the command prompt):

$ LayoutBeamer
or
$ LayoutBEAMER
or
$ LayoutBeamer.csh

 

A previous version of GenISys Beamer may be available in case of bugs found in the most recently installed version. Invoke the previous version of Beamer with the following command:

$ beamer-previous

 

Occassionally, CNF will beta-test a new version of GenISys Beamer. If available, the developmental test version of Beamer may be invoked with the following command:

$ beamer-devel

Python Invocation

Beamer includes a python library. We have created two shell scripts which start Python with your environment appropriately set for Beamer.

To use the production version of Beamer with Python:

$ beamer-python [additional arguments]

 

To use the devel version of Beamer with Python:

$ beamer-devel-python [additional arguments]


In your python script, you will need to import "BEAMERpy" .

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