...
Prediction of swing curve, process parameters, resist profile, pattern shape, mask design, stepper optimization.
Documentation:
Getting Started
PROLITH by KLA-Tencor
PROLITH by KLA-Tencor Product Page
PROLITH by KLA-Tencor Training Document
...
Prediction of swing curve, process parameters, resist profile, pattern shape, mask design, stepper optimization.
Getting Started
PROLITH by KLA-Tencor
PROLITH by KLA-Tencor Product Page
PROLITH by KLA-Tencor Training Document