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Academic Research Use Only:
PROLITH is available for academic research use only. Users with both industrial and academic research projects must only use this software for the academic research projects.
User may not use the Software for any activity which is a work for hire or performed under contract to conduct proprietary research or create proprietary work product for government agencies or private, commercial enterprises
Acknowledgement Requirements:
If User publishes any papers, abstracts, or similar publications, User will acknowledge PROLITH and/or/KLA products in use by USER, in any an all such papers, abstracts, or similar publications that may result from the use of the (Prolith) Software. User shall identify "PROLITH by KLA" as a sponsor on its group web pages.
KLA requests that user cite the "PROLITH by KLA" product page.
Capabilities:
EUV, 193nm, 248nm, i-line, and g-line sources, conventional and shaped illumination, polarization, binary and phase shift masks, OPC, immersion, double-patterning, wafer topology, etch results, GDS-II import/export, result file/graphic export.
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