E-beam Pattern Conversion and Proximity Correction
Equipment Training Layout BEAMER training is part of the General Electron Beam Lithography Training. See CNF Lab Users Electron-Beam Lithography page for details on trainings. |
Description:
The preparation of large layout data for e-beam direct write requires a highly efficient, flexible and robust framework for design and execution of complex processes including layout handling, processing, PEC, process modeling & correction, inspection and conversion to the machine format. Layout BEAMER is a highly intuitive, process flow driven layout processing solution.
Capabilities:
- VisualFLOWTM graphical user interface for drag & drop design of process flows
- Import of layouts in different formats
- Layout Viewer
- Extraction of cells, layers or regions of interest
- Export to different formats
Layout operation (e.g. healing, tone-reversal, bias, Boolean functions)
- E-Beam Proximity Effect Correction
- Output formatter for different E-Beam machines
Large Beamer Flows:
If you are processing a large BEAMER design, you may need more resources than those available on the physical CNF conversion computers. We have you covered – BEAMER can be run in the cloud on AWS for low hourly rates. CNF Computing will work with you to set up a virtual machine optimized for your jobs memory, cpu, and/or disk I/O and storage requirements.
Documentation:
- Beamer Quick Start
- Beamer Tone Reversal
- LayoutBeamer Manual
- LayoutBeamer Training Videos
- JEOL Formatter Manual
- Heidelberg Formatter Manual
- Data Preparation - Zero Width Lines
Invoking Beamer:
On the CNF conversion computers, the current version of GenISys Beamer can be invoked with any of the following commands (don't type in the dollar sign, that is the command prompt):
$ LayoutBeamer or $ LayoutBEAMER or $ LayoutBeamer.csh
A previous version of GenISys Beamer may be available in case of bugs found in the most recently installed version. Invoke the previous version of Beamer with the following command:
$ beamer-previous
Occassionally, CNF will beta-test a new version of GenISys Beamer. If available, the developmental test version of Beamer may be invoked with the following command:
$ beamer-devel
Python Invocation
Beamer includes a python library. We have created two shell scripts which start Python with your environment appropriately set for Beamer.
To use the production version of Beamer with Python:
$ beamer-python [additional arguments]
To use the devel version of Beamer with Python:
$ beamer-devel-python [additional arguments]
In your python script, you will need to import "BEAMERpy" .