Sputtering process library on the CNF website
Odd-hour thermal evaporation of aluminum on fused silica
TOOL: E-Beam Evaporator
SOURCE: Aaron Windsor
ADDED: 12/6/13
A higher deposition rate was used for better adhesion.
• Use a tungsten flat boat with one ¼” x ¼” aluminum pellet. This will provide a maximum of 250 nanometers of deposition (be aware that the aluminum may wet and collect on the underside of the boat which will lower the total deposition).
• Pump down to at least 2.0 x 10-6
• Set the Voltage to five Volts.
• Increase the power to the thermal hearth 15% a minute until you get to ≈ 60%. The pellet should start to melt at ≈ 58-65% power.
• Once the pellet melts, let the aluminum migrate across at least 2/3 of the boat. You may need to slowly increase the power.
• Increase the rate quickly to ≈ 74.0% for a rate between 10-30 Å/sec and quickly open the shutter.
• Do not let the power go above 80%.
• Do not let the current go above 13 Amps.
• Wait fifteen minutes after your deposition before venting the bell jar.
• Do not reuse the aluminum boats.
User Recipes
Fe catalyst for nanotube growth
TOOL: E-Beam Evaporator
SOURCE: McEuen Group
ADDED: 2/17/13
For aligned arrays we've been using Fe layers of 1-3 angstroms.