E-beam Pattern Conversion and Proximity Correction
Equipment Training Layout BEAMER training is part of the General Electron Beam Lithography Training. See CNF Lab Users Electron-Beam Lithography page for details on trainings. |
Description:
The preparation of large layout data for e-beam direct write requires a highly efficient, flexible and robust framework for design and execution of complex processes including layout handling, processing, PEC, process modeling & correction, inspection and conversion to the machine format. Layout BEAMER is a highly intuitive, process flow driven layout processing solution.
Capabilities:
- VisualFLOWTM graphical user interface for drag & drop design of process flows
- Import of layouts in different formats
- Layout Viewer
- Extraction of cells, layers or regions of interest
- Export to different formats
Layout operation (e.g. healing, tone-reversal, bias, Boolean functions)
- E-Beam Proximity Effect Correction
- Output formatter for different E-Beam machines
Documentation:
- Beamer Quick Start
- Beamer Tone Reversal
- LayoutBeamer Manual
- LayoutBeamer Training Videos
- JEOL Formatter Manual
- Heidelberg Formatter Manual
Invoking Beamer:
On the CNF conversion computers, the current version of GenISys Beamer can be invoked with any of the following commands (don't type in the dollar sign, that is the command prompt):
$ LayoutBeamer or $ LayoutBEAMER or $ LayoutBeamer.csh
A previous version of GenISys Beamer may be available in case of bugs found in the most recently installed version. Invoke the previous version of Beamer with the following command:
$ beamer-previous
Occassionally, CNF will beta-test a new version of GenISys Beamer. If available, the developmental test version of Beamer may be invoked with the following command:
$ beamer-devel