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step 1 - copy gds file into this directory:
step 2 - right click to convert gds to dc2:
step 2.1 - change drawing unit size to 1 and press convert:
step 3 - right click on new dc2 file and select DesignCAD Express:
step 3.1 - click NPGS - setdump
step 3.1.1 - the dump point is green:
step 3.2 - click NPGS - MaxMag:
step 3.3 - click NPGS - save - exit when done - then re-open to double check dump existence:
step 4 - right click on dc2 - choose run file editor:
step 4.1 - for fine contacts process 2 entities - set params as shown - pattern name is name of dc2 file:
step 4.2 - 1st entity is alignment - set params as shown - insert measured beam current in pA:
step 4.2.1 - skip all non alignment layers:
step 4.3 - 2nd entity for fine contacts - skip all alignment layers - change line to area dose:
step 4.3.1 - enter params as shown - same for each layer! - skip contact pad layer - remember to update measured current
step 4.4 - save run file - extension RF6 - and exit:
step 5 - find run file - right click - process run file:
step 5.1 - click continue - the writing will start!
step 6 - set up contact pad exposure - use these params:
step 6.1 - skip all but contact pad layer - enter params - remember to update measure current - proceed as before:
