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CNF User Wiki Home
Tool Processes
Electron Beam Lithography
Jira links
Training Materials
Created by
David William Botsch
, last modified on
Jul 25, 2016
Electron Beam Lithography Pattern Preparation Guidelines and Procedures
Advanced Electron Beam Lithography Processes
(EBL on insulating substrates and T-Gate processes for high electron mobility transistors)
Layout BEAMER
(all material via the CNF website)
LayoutBeamer Manual
BEAMERQUICKSTART05-2010v4a.pdf
Beamer Tone Reversal
Training Videos
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