Table of Contents:

Processes Available on the Oxford ALD FlexAL

Manuals and Guides

• Slides from 2010 TCN

Supplementary Files

• TaN plasma characterization
  SOURCE: (AFS: Fellows)
  DATE: 1/24/2013

• Devlopment of a Stress-Free Polysilicon Deposition and Annealing Process
  SOURCE: (CNF website)
  DATE: 8/13/2009

• Ta2O5 (TaOx) plasma characterization
  SOURCE: (AFS: Fellows)
  DATE: 1/15/2013