E-beam Pattern Conversion and Proximity Correction

Description:

The preparation of large layout data for e-beam direct write requires a highly efficient, flexible and robust framework for design and execution of complex processes including layout handling, processing, PEC, process modeling & correction, inspection and conversion to the machine format. Layout BEAMER is a highly intuitive, process flow driven layout processing solution.

Capabilities:

• VisualFLOWTM graphical user interface for drag & drop design of process flows
• Import of layouts in different formats
• Layout Viewer
• Extraction of cells, layers or regions of interest
• Export to different formats

• Layout operation (e.g. healing, tone-reversal, bias, Boolean functions)

• E-Beam Proximity Effect Correction
• Output formatter for different E-Beam machines

Documentation:

• Beamer Quick Start
• Beamer Tone Reversal
• LayoutBeamer Manual
• LayoutBeamer Training Videos