Table of Contents:

Processes Available on the Oxford ALD FlexAL

Processes Available on the Arradiance GEMStar

• Thermal Al2O3
• Thermal TiO2
• Thermal HfO2
• Thermal ZrO2
• Thermal HfZrO2 (piezoelectric HZO)
• Thermal Pt

Processes Available on the Veeco Savannah

• Thermal Al2O3
• Thermal Pt (O2 or O3)
• Thermal Ru

Manuals and Guides

• Slides from 2010 TCN

Supplementary Files

• TaN plasma characterization
  SOURCE: (AFS: Fellows)
  DATE: 1/24/2013
• Ta2O5 (TaOx) plasma characterization
  SOURCE: (AFS: Fellows)
  DATE: 1/15/2013
• A streamlined approach to particle ALD coating of spherical beads
  SOURCE: Fellows
  DATE: 11/23/2016