Photolithography Modeling Software
Training is available through CULearn... sign up for course: RSRCH - CNF - PROLITH Video Training In-person assistance may be give usually given one-on-one to interested users by request. Group sessions are may also be scheduled on request. KLA-Tencor's software licensing sponsorship requires that PROLITH by KLA-Tencor be ONLY available to academic users of CNF.Please contact Garry Bordonaro for training. |
Description:
Projection Lithography simulation software for prediction of printed patterns in photoresist. Includes interactions of light sources, optics, photoresist and film stack, as well as processing parameters.
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